Stochastic characterization of phase detection algorithms in phase-shifting interferometry
نویسندگان
چکیده
منابع مشابه
Phase shifter calibration in phase-shifting interferometry.
This paper describes some practical methods to calibrate the phase shifter in phase-shifting interferometry (PSI). The phase shifter used in the experiment is a piezoelectric transducer (PZT) that has a nonlinearity of <l%. Using the quantitative method described in this paper, the repeatability in the measurement of the phase-shifting angle is ̃9.046 rms, and the 3σ value is 0.139. A calibratio...
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ژورنال
عنوان ژورنال: Applied Optics
سال: 2016
ISSN: 0003-6935,1539-4522
DOI: 10.1364/ao.55.008925